The use of AM @ ASML

In our quest to continue Moore’s low into the next decade, new manufacturing technologies are being adopted for our lithographic machines. One of such technologies is Additive Manufacturing that opens the opportunity to produce parts that are directly contributing to the performance of our machines. More than 200 different machine parts are in volume production by additive manufacturing of metal, plastics and ceramics. The main focus of the lecture is to show the ways in which Additive Manufacturing is helping increase the performance of ASML machines with examples of actual parts used in production.  To safeguard the quality, ASML has released an internal standard for AM that empowers suppliers to put in place the quality measures required to produce reliable parts.

Presentation language: ENG